Document Type
Article
Rights
Available under a Creative Commons Attribution Non-Commercial Share Alike 4.0 International Licence
Disciplines
1.3 PHYSICAL SCIENCES, Optics
Abstract
We describe an optical system for 3-D profilometry based on the white light interferometer. We detail a simple way to construct a profiler that uses two simple algorithms which deal efficiently and quickly with the data. The system has a theoretically unlimited range and can deal with rough and smooth surfaces
DOI
https://doi.org/10.1117/1.601727
Recommended Citation
Bowe, B., Toal, V. (1998) White light interferometric surface profiler. Optical Engineering, Vol. 37, pp.1796. doi:10.1117/1.601727
Publication Details
Optical Engineering, 37,(6), 1796-9, (1998) Available from the publisher here doi:10.1117/1.601727