Document Type

Article

Rights

Available under a Creative Commons Attribution Non-Commercial Share Alike 4.0 International Licence

Disciplines

1.3 PHYSICAL SCIENCES, Optics

Publication Details

Optical Engineering, 37,(6), 1796-9, (1998) Available from the publisher here doi:10.1117/1.601727

Abstract

We describe an optical system for 3-D profilometry based on the white light interferometer. We detail a simple way to construct a profiler that uses two simple algorithms which deal efficiently and quickly with the data. The system has a theoretically unlimited range and can deal with rough and smooth surfaces

DOI

https://doi.org/10.1117/1.601727

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